Exploring the early stages of silver growth on Ag(110) surface employing silver(I) acetamidinate as ALD Precursor: a DFT study

J I Paez-Ornelas,Noboru Takeuchi,J Guerrero-Sánchez,José Israel Paez Ornelas,Jonathan Guerrero-Sanchez
DOI: https://doi.org/10.1039/d3cp05448a
IF: 3.3
2024-02-10
Physical Chemistry Chemical Physics
Abstract:The advancement of atomic layer deposition (ALD) techniques for the controlled growth of transition metals thin films is hindered by the current scarcity of organometallic (OM) precursors capable of facilitating precise deposition and clean film growth. In this context, acetamidinates have emerged as a highly promising family of OM precursors due to their exceptional attributes, including outstanding stability, favorable volatility, and reactivity at low evaporation and deposition temperatures. These unique properties make them a sought-after candidate for enabling ALD processes. Here we conducted an atomic-scale study to get an in-depth understanding of the entire deposition cycle of silver(I)-N, N'-dimethylacetamidinate on Ag(110). Our research sheds light on the intricate molecular interactions and the mechanistic insights in this essential ALD process, contributing to the broader understanding of OM precursor utilization in achieving controlled thin film growth of transition metals. This work represents a significant step towards overcoming the current limitations and expanding the horizons of ALD techniques for advanced materials synthesis.
chemistry, physical,physics, atomic, molecular & chemical
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