Abstract:We are developing superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting specifications of X-ray imaging spectrometers including high count-rate, high energy resolution, and large field-of-view. In particular, a focal plane composed of two sub-arrays: one of fine-pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit (X-IFU) instrument on the European Space Agency's Athena mission. We have based the sub-arrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all gold X-ray absorber on 50 and 75 micron scales where the Mo/Au TES sits atop a thick metal heatsinking layer have shown high resolution and can accommodate high count-rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au and an added bismuth layer in a 250 micron square absorber. To tune the parameters of each sub-array requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single ion milling step. We demonstrate methods for integrating heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each sub-array, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (Tc) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these "hybrid" arrays will be presented.

Developments on Frequency Domain Multiplexing Readout for Large Arrays of Transition-Edge Sensor X-ray Micro-calorimeters

Developments on frequency domain multiplexing readout for large arrays of transition-edge sensor X-ray micro-calorimeters

Development of frequency domain multiplexing for the X-ray Integral Field Unit (X-IFU) on the Athena

Frequency domain multiplexing readout for large arrays of transition-edge sensors

Progress in the development of frequency domain multiplexing for the X-ray Integral Field Unit on board the Athena mission

Characterization of high aspect ratio TiAu TES X-ray microcalorimeters array using the X-IFU Frequency Domain Multiplexing readout

A multiplexer for the ac/dc characterization of TES based bolometers and microcalorimeters

Optimising the multiplex factor of the frequency domain multiplexed readout of the TES-based microcalorimeter imaging array for the X-IFU instrument on the Athena Xray observatory

Frequency shift algorithm: Design of a baseband phase locked loop for frequency-domain multiplexing readout of x-ray transition-edge sensor microcalorimeters

Development of the superconducting detectors and read-out for the X-IFU instrument on board of the X-ray observatory Athena

Performance of an X-ray single pixel TES microcalorimeter under DC and AC biasing

Background rates of x-ray transition-edge sensor micro-calorimeters under a frequency domain multiplexing readout for solar axion-like particles' detection

Simultaneous readout of 128 X-ray and gamma-ray transition-edge microcalorimeters using microwave SQUID multiplexing

System performance of a TDM test-bed with long flex harness towards the new X-IFU FPA-DM

Calibration and Testing of Small High-Resolution Transition Edge Sensor Microcalorimeters with Optical Photons

Signal readout for Transition-Edge Sensor X-ray imaging spectrometers

System Performance of a TDM Test-Bed with Long Flex Harness Toward the New X-IFU FPA-DM

Fabrication of X-ray Microcalorimeter Focal Planes Composed of Two Distinct Pixel Types

Demonstration of Athena X-IFU Compatible 40-Row Time-Division-Multiplexed Readout

Beamline Spectroscopy of Integrated Circuits With Hard X-ray Transition Edge Sensors at the Advanced Photon Source

System performance of a cryogenic test-bed for the time-division multiplexing readout for NewAthena X-IFU