Abstract:Scanning tunneling microscope (STM) has presented a revolutionary methodology to the nanoscience and nanotechnology. It enables imaging the topography of surfaces, mapping the distribution of electronic density of states, and manipulating individual atoms and molecules, all at the atomic resolution. In particular, the atom manipulation capability has evolved from fabricating individual nanostructures towards the scalable production of the atomic-sized devices bottom-up. The combination of precision synthesis and in situ characterization of the atomically precise structures has enabled direct visualization of many quantum phenomena and fast proof-of-principle testing of quantum device functions with real-time feedback to guide the improved synthesis. In this article, several representative examples are reviewed to demonstrate the recent development of atomic scale manipulation. Especially, the review focuses on the progress that address the quantum properties by design through the precise control of the atomic structures in several technologically relevant materials systems. Besides conventional STM manipulations and electronic structure characterization with single-probe STM, integration of multiple atomically precisely controlled probes in a multiprobe STM system vastly extends the capability of in situ characterization to a new dimension where the charge and spin transport behaviors can be examined from mesoscopic to atomic length scale. The automation of the atomic scale manipulation and the integration with the well-established lithographic processes would further push this bottom-up approach to a new level that combines reproducible fabrication, extraordinary programmability, and the ability to produce large-scale arrays of quantum structures.

Autonomous Scanning Tunneling Microscopy Imaging via Deep Learning

A deep learning framework for automated molecular recognitions in scanning probe microscopy images.

Artificial-intelligence-driven scanning probe microscopy

Applying a Deep-Learning-Based Keypoint Detection in Analyzing Surface Nanostructures

Deep Learning of Atomically Resolved Scanning Transmission Electron Microscopy Images: Chemical Identification and Tracking Local Transformations

Long Range And Accurate Measurement Of Deep Trench Microstructures By A Specialized Scanning Tunneling Microscope

Automated Structure Discovery for Scanning Tunneling Microscopy

Accurate atomic scanning transmission electron microscopy analysis enabled by deep learning

Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures

Deep learning for electron and scanning probe microscopy: From materials design to atomic fabrication

Dual Tunneling Unit Scanning Tunneling Microscope for Nano-Metrology

Robust multi-scale multi-feature deep learning for atomic and defect identification in Scanning Tunneling Microscopy on H-Si(100) 2x1 surface

Scanning Tunneling Microscopy-Based in Situ Measurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Image Super Resolution for Scanning Tunneling Microscopy and Atomic Force Microscopy

A wide-range metrology AFM and its applications

Deep Learning Enables Large Depth-of-Field Images for Sub-Diffraction-Limit Scanning Superlens Microscopy

Atomic-scale manipulation and in situ characterization with scanning tunneling microscopy

DETECTING AND MANIPULATING SINGLE MOLECULES WITH STM

A novel scanning tunneling microscopy for long range and high aspect ratio measurement

An Automated Scanning Transmission Electron Microscope Guided by Sparse Data Analytics