Synthesis and Characterization of Tungsten Amide Complexes for the Deposition of Tungsten Disulfide Thin Films

Ji Young Son,Su Han Kim,Ji Min Seo,Jongsun Lim,Taek-Mo Chung,Bo Keun Park
DOI: https://doi.org/10.1021/acsomega.3c01706
IF: 4.1
2023-05-24
ACS Omega
Abstract:<p> </p> <p>To substitute corrosive halogen ligands, we designedand synthesizednovel tungsten complexes containing amido ligands, W(DMEDA)<sub>3</sub> (1) and W(DEEDA)<sub>3</sub> (2) (DMEDA= N,N′-dimethylethylenediamido;DEEDA = N,N′-diethylethylenediamido).Complexes 1 and 2 were characterized by <sup>1</sup>H NMR, <sup>13</sup>C NMR, FT-IR, and elemental analysis.The pseudo-octahedral molecular structure of 1 was confirmedby single-crystal X-ray crystallography. The thermal properties of 1 and 2 were analyzed by thermogravimetric analysis(TGA), which confirmed that the precursors were volatile and exhibitedadequate thermal stability. Additionally, the WS<sub>2</sub> depositiontest was performed using 1 in thermal chemical vapordeposition (thermal CVD). Further analysis of the surface of the thinfilms was conducted using Raman spectroscopy, scanning electron microscopy(SEM), and X-ray photoelectron spectroscopy (XPS).</p>
chemistry, multidisciplinary
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