Abstract:This paper presents a conceptual framework for experimental research combined with numerical analysis on direct current (DC) glow discharges in microscale planar gas discharge-semiconductor systems (GDSS). In the experimental section, several structural and elemental analyses, including SEM, EDAX, AFM, and near-infrared absorption spectra measurements were carried out for compound semiconductor zinc selenide (ZnSe) cathode sample. Argon (Ar) was charged into the plasma reactor cell of GDSS at pressures of 100 Torr subatmospheric and 760 Torr atmospheric, respectively, by a vacuum pump- gas filling station. Glow discharge light emissions from plasma, excited under three different intensity levels (dark, weak, strong) of infrared beam illumination on ZnSe cathode electrode, were measured by using a phomultiplier tube that is sensitive to UV–Visible wavelengths. In the numerical analysis section, simulation studies were carried out on the two-dimensional gas discharge-semiconductor microplasma system (GDSμPS) cell models using the finite-element method (FEM) solver COMSOL Multiphysics DC plasma program. Calculations and predictions were based on mixture-averaged diffusion drift theory and Maxwellian electron energy distribution function. GDSμPS cell was modeled in a square chamber with planar anode/cathode electrode pair coupled at a 50 μm discharge gap. Single side of ZnSe cathode was finely micro-digitated to increase the effective surface area for enhanced electron emission to the gas discharge cell. The electrical equivalent circuit (EEC) of the proposed model was driven by 1.0 kV DC voltage source. Binary Ar/H 2 gas medium in a mixture of 3:2 molar ratio was introduced to the gas discharge chamber at constant 200 Torr subatmospheric pressure. Simulations were run for normal glow discharges to exhibit the electrical fast transient glow discharge behaviours from electron field emission state to self-sustained normal glow discharge state by numerically solving the electron density (ED), electron current density (ECD) and electric potential distribution (EPD) parameters.

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