High-efficiency n-TOPCon bifacial solar cells with selective poly-Si based passivating contacts
Qinqin Wang,Hui Peng,Siwen Gu,Kaiyuan Guo,Wangping Wu,Bairu Li,Lvzhou Li,Ningyi Yuan,Jianning Ding
DOI: https://doi.org/10.1016/j.solmat.2023.112458
IF: 6.9
2023-07-08
Solar Energy Materials and Solar Cells
Abstract:Improving the conversion efficiency of n-TOPCon solar cell is still a hot topic. The selective poly-Si based passivating contacts (Poly-SEs) are ideal candidates for reducing the parasitic absorption and contact resistivity of n-type silicon solar cells and for providing better current collection. In this work, we used LPCVD and the POCl 3 tube furnace diffusion methods to fabricate the selective poly-Si based passivating contacts, and studied the influences of key process parameters of the SiO x layer formation process (the oxidation duration ( t oxidation ) and the constant pressure duration ( t pressure )), and POCl 3 tube diffusion process parameters (the POCl 3 -N 2 carrier gas flow rate at the deposition, deposition temperature, drive-in temperature) on the n + -poly-Si profiles, recombination current density ( J 0 ), contact resistivity ( ρ c ) of n-TOPCon solar cells. The results showed that the t oxidation and t pressure had a significant impact on J 0 and ρ c which were mainly related to the distribution number of O and Si 4+ content on the growth of the SiO x layer. And the influence of the drive-in temperature of phosphorus (P) diffusion process on J 0 value is stronger than that of the deposition temperature, which was mainly related to the chemical passivation of SiO x layer induced by P-indiffusion into Si at high temperature. The reduction in the thickness of poly-Si from 110 nm to 30 nm led to an increase in the short-circuit current density ( J sc ) per nanometer of ∼0.0093 mA/cm 2 per nm. The Poly-SEs were fabricated by 3D printing mask technology and secondary LPCVD/phosphorus diffusion with J 0, n+ ≈ 5 fA/cm 2 (n + -poly-Si layer ≈ 50 nm) and J 0, metal,n++ ≈ 73.8 fA/cm 2 (n ++ -poly-Si layer ≈ 110 nm), and the efficiency was improved by 0.12% owing to the increase in J sc value of 0.28 mA/cm 2 . After optimizing the passivation process, the industrial-grade TOPCon bifacial cells reached an efficiency ( E ff ), V oc , J sc , and FF values as high as 25.4%, 721 mV, 42.2 mA/cm 2 , and 83.5%, respectively.
materials science, multidisciplinary,physics, applied,energy & fuels