Systematic Studies into the Area Selectivity of Chemical Vapor Deposition Polymerization

Xiaoyang Zhong,Rob Jordan,Jiun-Ruey Chen,Jeffery Raymond,Joerg Lahann
DOI: https://doi.org/10.1021/acsami.3c01268
IF: 9.5
2023-04-21
ACS Applied Materials & Interfaces
Abstract:As the current top-down microchip manufacturing processes approach their resolution limits, there is a need for alternative patterning technologies that offer high feature densities and edge fidelity with single-digit nanometer resolution. To address this challenge, bottom-up processes have been considered, but they typically require sophisticated masking and alignment schemes and/or face materials' compatibility issues. In this work, we report a systematic study into the impact of thermodynamic...
materials science, multidisciplinary,nanoscience & nanotechnology
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