Abstract:Carbon dioxide ( <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> ) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> gas sensing at 4.2 µm wavelength using an integrated silicon waveguide, featuring a sensitivity to <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications.

Silicon Waveguide Sensors for Carbon Dioxide Gas Sensing in the Mid-Infrared Region

Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide

Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy

Suspended Slot Membrane Waveguide Based on Germanium-on-Silicon-on-Insulator at λ = 4.23 μm for CO2 Monitoring

Volume detection based on porous silicon waveguide for CO_2 mid-infrared spectroscopy

Sensitive Carbon Monoxide Detection Based on Light Induced Thermoelastic Spectroscopy with a Hollow Waveguide and 2.3 Μm Diode Laser

Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications

On-chip Long-Wave Infrared Gas Sensor Based on Subwavelength Grating Waveguide

Design of an optical gas sensor based on chalcogenide (ChG) glass platform in the mid-infrared for detection of CO2 and CO

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Portable ppb-level carbon dioxide sensor based on flexible hollow waveguide cell and mid-infrared spectroscopy

Monolithic Mid-IR Methane Gas Sensor with Waveguide-Integrated Detector

On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 μm

Mid-infrared Quasi-Distributed Carbon Monoxide Gas Sensing Based on QEPAS and Hollow Waveguide

Dual Silicon Microring Resonators for Carbon Dioxide Gas Sensing

Detection of volatile organic compounds using mid-infrared silicon nitride waveguide sensors

Planar Polymer Optical Waveguide with Metal‐Organic Framework Coating for Carbon Dioxide Sensing

A Single Slot Micro-Ring Structure for Simultaneous CO2 and CH4 Gas Sensing

Sandwiched Long-Period Fiber Grating Fabricated by MEMS Process for CO2 Gas Detection

Highly-sensitive Optical Waveguide Sensor Based on SiON Using Two Cascaded-Microring Resonators

Integration of a Metal-Organic Framework Film with a Tubular Whispering-Gallery-Mode Microcavity for Effective CO<sub>2</sub> Sensing