Dual Silicon Microring Resonators for Carbon Dioxide Gas Sensing

Hui Zhang,Jiaqi Wang,Penghao Ding,Zihao Ou,Yingqi Xu,Guoxian Wu,Zhijian Mao,Xu Li,Yu Du,Youfu Geng,Xuejin Li,Zhenzhou Cheng
DOI: https://doi.org/10.1109/icocn63276.2024.10648320
2024-01-01
Abstract:We proposed dual microring resonators with SiO2 and polyhexamethylene biguanide hydrochloride claddings for CO2 sensing with temperature compensation, achieving a simulated sensitivity of 3.6 pm/ppm. Then we fabricated dual microrings and conducted temperature-response measurements.
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