Abstract:Silicon and germanium are waveguide core materials for Si-based Group-IV integrated photonic circuit applications in the mid-infrared (MIR) wavelength range defined here as 2 to 15 um. In particular, Si and Ge are transparent up to 8 and 15 μm respectively, thus offering applications in communications and the sensing of biochemical, medical, and environmental variables [1]. The major problem with the MIR transition is that the most dominant platform of SOI can be used only up to 4 μm due to the high absorption loss of silicon dioxide. Therefore alternative material platforms have to be utilized for longer wavelengths. Presently, the Ge-on-Si platform (known as GOS) has been demonstrated to be workable to 15 μm-thereby offering potential for MIR applications. However, the refractive index contrast between Ge (n=4.1) and Si (n=3.4) is considerably less than that of SOI. As a result, the bend radii in GOS must be considerably larger than those in SOI, causing the footprint of GOS on-chip sensor circuits to be generally larger than those of SOI, an unwanted increase in “real estate.” What is wanted is a better alternative Ge-waveguide platform that will provide a larger core-clad index contrast than GOS as well as useful transparency and smaller channel-bend radii. To achieve those goals, the new structure proposed and realized here is Germanium on Silicon Nitride (Ge-on-Si3N4) which is referred-to here as GON. The refractive index of silicon nitride is 2.4 and it is transparent up to ~7 μm. So the index contrast in GON is 1.7 compared to 0.7 in GOS. Our simulation results show that this structure can provide a more compact integrated network whose bend radii are only a few μm. Most importantly, we have developed a new and practical wafer bonding and layer transfer technique, reported here, to realize GON.

Suspended Slot Membrane Waveguide Based on Germanium-on-Silicon-on-Insulator at λ = 4.23 μm for CO2 Monitoring

Silicon Waveguide Sensors for Carbon Dioxide Gas Sensing in the Mid-Infrared Region

Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide

Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy

Monolithic Mid-IR Methane Gas Sensor with Waveguide-Integrated Detector

Ultra-high-power-confinement-factor Integrated Mid-Infrared Gas Sensor Based on the Suspended Slot Chalcogenide Glass Waveguide

Sandwiched Long-Period Fiber Grating Fabricated by MEMS Process for CO2 Gas Detection

Suspended Microracetrack Resonator with Lateral Sub-wavelength-Grating Metamaterial Cladding for Mid-infrared Sensing Applications

KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications

Germanium-On-Silicon Nitride Waveguides for Mid-Infrared Integrated Photonics

Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications

On-chip Long-Wave Infrared Gas Sensor Based on Subwavelength Grating Waveguide

Modeling and Fabrication of Ge-on-Si3N4 for Low Bend-Loss Waveguides

On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 μm

Freestanding Germanium Photonic Crystal Waveguide for a Highly Sensitive and Compact Mid-Infrared On-Chip Gas Sensor

Volume detection based on porous silicon waveguide for CO_2 mid-infrared spectroscopy

Sensitive Carbon Monoxide Detection Based on Light Induced Thermoelastic Spectroscopy with a Hollow Waveguide and 2.3 Μm Diode Laser

Germanium doped D-shaped PCF-SPR Methane High Sensitivity Sensor

Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides.

Design of an optical gas sensor based on chalcogenide (ChG) glass platform in the mid-infrared for detection of CO2 and CO

Numerical analysis of an infrared gas sensor utilizing an indium-tin-oxide-based plasmonic slot waveguide