The impact of hydrogen plasma on the structure and morphology of tin and lead micrometer sized particles

D Shefer,J Beckers,Andrey Nikipelov,Mark Kerkhof,Zahra Marvi,Vadim Y Banine
DOI: https://doi.org/10.1088/1361-6463/acb3d9
2023-01-19
Abstract:The morphological stability of micrometer sized particles in hydrogen plasma is essential for Extreme Ultraviolet (EUV) lithography, the ITER fusion program and the application of catalyst reactions. We experimentally investigated the morphological evolution of tin (Sn), lead (Pb) and lead (II) oxide (PbO) micrometer sized particles on a surface which is exposed to a low pressure hydrogen plasma. Post treatment particle cross sections obtained by a Scanning Electron Microscope accompanied by a Focus Ion Beam demonstrated a significant influence of hydrogen plasma exposure on both the surface and the bulk material of the particles: lead particles appeared to be more vulnerable to direct etching while tin particles demonstrated the growth of cavities within their volume. As explanation for the observed plasma-induced morphological changes, we suggest two major mechanisms: chemical etching with as a result the formation of volatile hydrides and the accumulation of pressurized molecular hydrogen in cavities in the bulk material. These mechanisms may influence the adhesion of particles to the surface through the introduction of asperities and fragmentation through the introduction of mechanical stress.
physics, applied
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