All-epitaxial resonant cavity enhanced long-wave infrared detectors for focal plane arrays

P. Petluru,A. J. Muhowski,A. Kamboj,N. C. Mansfield,M. Bergthold,E. A. Shaner,J. F. Klem,D. Wasserman

DOI: https://doi.org/10.1063/5.0131628

IF: 4

2023-01-11

Applied Physics Letters

Abstract:We demonstrate a monolithic all-epitaxial resonant-cavity architecture for long-wave infrared photodetectors with substrate-side illumination. An nBn detector with an ultra-thin ( t≈350 nm ) absorber layer is integrated into a leaky resonant cavity, formed using semi-transparent highly doped ( n++ ) epitaxial layers, and aligned to the anti-node of the cavity's standing wave. The devices are characterized electrically and optically and demonstrate an external quantum efficiency of ∼25% at T=180 K in an architecture compatible with focal plane array configurations.

physics, applied