Abstract:Intelligent, integrated and cost-effective micro-electro-mechanical system (MEMS) and micro sensors can be developed with TiNi-based memory alloy thin film and optical fibers. Such devices can work in harsh environment, like in deep sea, in space with flammable or explosive objects, or with strong electromagnetic interference; and examples of their possible applications include gas concentration detection in underground mines, dynamic detection of production parameters in oil or gas mining, etc. As TiNi-based memory alloy thin film possesses good biocompatibility, such devices can also be used in intracranial/endocardial pressure test, surgical resection, early cancer assessment, etc. The successful development of the above MEMS and micro sensors involve optical fibers coated with memory alloy films. However, unlike the common planar substrates, optical fiber is of a cylinder with a small diameter, and how to grow good-quality memory alloy film on its surface remains to be explored.In this work, the silica fibers are coated with TiNi memory alloy films by magnetron sputtering. How to choose the proper operating parameters in the sputtering process, and also the effects of subsequent annealing treatment on the films, are discussed in detail. Uniform thin films are grown on the 125-μm-diameter cylindrical surfaces of optical fibers with our built coating mask device specially designed for fibers. The experiments show that when target-substrate distance, background vacuum degree, Ar gas flow and sputtering time are fixed in the sputtering process, the sputtering power can be optimized, while a higher sputtering pressure results in lower film deposition rate but better surface roughness. The thin film is well crystallized under annealing, and the major martensite B19' phase and minor austenite B2 phase coexist in the Ti49.09Ni50.91 film. In the experiments, with the optimal operating parameters (sputtering power of 150 W and sputtering pressure of 0.23 Pa), TiNi memory alloy film about 852.2 nm in thickness is grown on the fiber at a deposition rate of 0.118 nm/s, and surface root mean square roughness of the unannealed film is 15.1 nm. Annealing at temperatures of 500 °C, 550 °C and 600 °C are respectively tried, and such a thermal treatment evidently refines the crystalline grains inside the film. Surface root mean square roughness of the film annealed at 600 °C is reduced to 6.32 nm.This work indicates that a glass fiber can be coated with high-quality TiNi-based memory alloy film, and it thus forms a part of the bases of further development of relevant MEMS and micro sensors.

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Aqua jet integrated fiber laser machining of quaternary NiTiCuZr alloy

Fiber laser cutting study on ternary NiTiV shape memory alloy

Cutting NiTi with Femtosecond Laser

Investigations on the interaction of laser parameters for efficient microdrilling of NiTiV smart alloy system

Enhancement of machining and surface quality of quaternary alloyed NiTiCuZr shape memory alloy through ultrasonic vibration coupled WEDM

Unleashing Multi-Scale Mechanical Enhancement in NiTi Shape Memory Alloy via Annular Intra-Laser Deposition with Homogenized Ti 2 Ni Nanoprecipitates

Fe-Mn-Al-Ni Shape Memory Alloy Additively Manufactured via Laser Powder Bed Fusion

Laser and Electron-Beam Surface Processing on NiTi Shape Memory Alloys: A Review

Technique of TiNi-based shape memory alloy thin film coated on optical fibers

Optimizing laser parameters and exploring building direction dependence of corrosion behavior in NiTi alloys fabricated by laser powder bed fusion

Laser deposition of titanium layer to enhance two-way shape memory behavior of Nitinol sheet

Effect of laser energy density on the phase transformation behavior and functional properties of NiTi shape memory alloy by selective laser melting

Study on interface and mechanical property of laser welding of NiTi shape memory alloy and 2A12 aluminum alloy joint with a TC4 wire

Effect of Volume Energy Density on Selective Laser Melting Niti Shape Memory Alloys: Microstructural Evolution, Mechanical and Functional Properties

Laser Powder Bed Fusion of NiTiHf High-Temperature Shape Memory Alloy: Effect of Process Parameters on the Thermomechanical Behavior

Abrasive aqua jet machining of NiTiV ternary smart alloy

Microstructure and Phase Transformation Temperature of NiTiNb Shape Memory Alloy Prepared by Laser Solid Forming Using Mixed Powder

Fatigue-Resistant Heterogeneous Gradient Nanocrystalline NiTi Shape Memory Alloy Fabricated by Pre-Strain Laser Shock Peening

Dissimilar Laser Welding of NiTi Alloy with Ferrous and Non-ferrous Material: Optimization of Process Parameters

Optimization of Cutting Conditions, Parameters, and Cryogenic Heat Treatment for Surface Roughness in Milling of NiTi Shape Memory Alloy