Abstract:In machine vision-based surface inspection tasks, defects are typically considered as local anomalies in homogeneous background. However, industrial workpieces commonly contain complex structures, including hallow regions, welding joints, or rivet holes. Such obvious structural interference will inevitably cause a cluttered background and mislead the classification results. Moreover, the sizes of various surface defects might change significantly. Last but not least, it is extremely time-consuming and not scalable to capture large-scale defect data sets to train deep CNN models. To address the challenges mentioned earlier, we first proposed to incorporate multiple convolutional layers with different kernel sizes to increase the receptive field and to generate multiscale features. As a result, the proposed model can better handle the cluttered background and defects of various sizes. Also, we purposely compress the size of parameters in the newly added convolutional layers for better learning of defect-related features using a limited number of training samples. Evaluated in a newly constructed surface defect data set (images contain complex structures and defects of various sizes), our proposed model achieves more accurate recognition results compared with the state-of-the-art surface defect classifiers. Moreover, it is a lightweight model and can deliver real-time processing speed (>100 frames/s) on a computer equipped with a single NVIDIA TITAN X Graphics Processing Unit (12-GB memory).

Mixed-Type Wafer Defect Pattern Recognition Framework Based on Multifaceted Dynamic Convolution

Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition

Smooth Surface Defect Detection by Deep Learning Based on Wrapped Phase Map

Efficient Mixed-Type Wafer Defect Pattern Recognition Based on Light-Weight Neural Network

Efficient Mixed-Type Wafer Defect Pattern Recognition Using Compact Deformable Convolutional Transformers

Mixed-type wafer defect detection based on multi-branch feature enhanced residual module

Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN

A Deep Learning-Based Surface Defect Inspection System Using Multiscale and Channel-Compressed Features

Mixed-Type Wafer Classification For Low Memory Devices Using Knowledge Distillation

Coarse-to-Fine Few-Shot Defect Recognition with Dynamic Weighting and Joint Metric

A Deep Convolutional Neural Network for Wafer Defect Identification on an Imbalanced Dataset in Semiconductor Manufacturing Processes

Two-Dimensional Principal Component Analysis-Based Convolutional Autoencoder for Wafer Map Defect Detection

Mixed-Type Wafer Failure Pattern Recognition

Wafer Defect Pattern Recognition Based on Differentiable Architecture Search with Dual Attention Module

Convolutional Neural Network for Semiconductor Wafer Defect Detection

Knowledge augmented broad learning system for computer vision based mixed-type defect detection in semiconductor manufacturing

PaLM: Point Cloud and Large Pre-trained Model Catch Mixed-type Wafer Defect Pattern Recognition

MDD-Net: A novel defect detection model of material microscope image

A voting-based ensemble feature network for semiconductor wafer defect classification

Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification