Abstract:Silicon carbide (SiC)-bonded diamond materials, comprising approximately 50% diamond by volume, represent innovative composites with exceptional mechanical and thermal properties, including high hardness, wear and corrosion resistance, and elevated thermal conductivity. Despite these advantageous properties, the machining of these composites presents formidable challenges due to their extremely high hardness. Grinding with diamond tools is commonly employed among the limited viable machining methods. However, the efficiency of this process is hindered by high grinding forces, elevated temperatures, and significantly high tool wear. Additionally, the surface integrity, form, and dimensional accuracy of the workpiece are compromised by the effects of tool wear and high cutting forces. To address these technological constraints in the grinding of SiC-bonded diamond materials, a laser-assisted grinding process has been developed. Ultra-short pulsed laser radiations were effectively utilized to induce material ablation with controlled structural damages, enhancing the productivity and efficiency of the grinding process through reduced grinding forces, temperatures, and tool wear. Furthermore, this study investigated the influence of grinding tools' specifications, design variations, and parameters on key aspects such as grinding forces, surface quality, and tool wear. Substantial reductions of up to 70% in tangential grinding forces, 83% in normal grinding forces, and a modest improvement in surface roughness achieved. The surface integrity analysis revealed a damage-free ground surface when utilizing laser assistance. Furthermore, there was a substantial enhancement in the grinding ratio (G-ratio), achieving an increase of up to 247%, concurrently with a noteworthy improvement in the actual removal depth, reaching up to 99%, when compared to conventional grinding processes. Compared to the utilized segmented metal bonded diamond grinding wheel, the vitrified bonded diamond grinding wheel induced lower grinding forces and higher actual removal rates.

Novel Vitrified-Bond Ultra-Fine Grinding Technology for SiC Polishing

Studies on the Surface Quality of the Unsteady-State Grinding Technique

High surface integrity fabrication of silicon wafers using a newly developed nonwoven structured grind-polishing wheel

Improved grinding performance of SiC using an innovative bionic vein-like structured grinding wheel optimized by hydrodynamics

Material removal characteristics of ultra-precision grinding silicon carbide ceramics

Grinding of silicon carbide for optical surface fabrication, Part 1: surface analysis

Mechanism analysis and process optimization of nanogrinding single-crystal SiC

E23 Grinding Performances of Metal-Bonded Diamond Wheel in Ultrasonic Assisted Internal Grinding of SiC Ceramics

Fabrication of Vitrified Bond Diamond Grinding Wheel via LCD Photopolymerization

Study on the Surface Generation Mechanism During Ultra-Precision Parallel Grinding of SiC Ceramics

Fused Silica Fine Grinding with Low Roughness

Study on the Resin Bond Diamond Grinding Wheel Used for Ultra-Precision Back Grinding Silicon Wafer

High Efficiency Precision Grinding of Micro-structured SiC Surface Using Laser Micro-structured Coarse-Grain Diamond Grinding Wheel

Study of catalytic properties and grinding performance of single-crystal SiC heterogeneous Fenton reaction grinding discs

An Experimental Investigation of Sapphire Grinding by Porous and Vitrified M0.5/1.5 Diamond Grinding Wheel

Chemical Mechanical Polishing of Micro-structures on SSiC

A general strategy for polishing SiC wafers to atomic smoothness with arbitrary facets

Laser-assisted Grinding of Reaction-Bonded SiC

Experimental investigation on the feasibility of high-efficiency and precision grinding of silicon carbide ceramics with monolayer brazed diamond wheel

Laser-assisted surface grinding of innovative superhard SiC-bonded diamond (DSiC) materials

Novel designed mechanical-mechanochemical synergistic micro-grinding technology and compounded abrasive micro-grinding tools