Surface acoustic wave coupling between micromechanical resonators

Hendrik Kähler,Daniel Platz,Silvan Schmid
DOI: https://doi.org/10.1038/s42005-022-00895-2
2022-05-17
Communications Physics
Abstract:Communications Physics, Published online: 16 May 2022; doi:10.1038/s42005-022-00895-2 As the size of mechanical resonators is decreased, their resonance frequencies increase and acoustic wave-like propagation in their substrate becomes important. Here, the coupling of two micromechanical resonators by surface acoustic waves is modelled analytically and numerically, showing dispersive and dissipative coupling of the resonators.
physics, multidisciplinary
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