Abstract:Smart gas-sensor devices are of crucial importance for emerging consumer electronics and Internet-of-Things (IoT) applications, in particular for indoor and outdoor air quality monitoring (e.g., CO2 levels) or for detecting pollutants harmful for human health. Chemoresistive nanosensors based on metal-oxide semiconductors are among the most promising technologies due to their high sensitivity and suitability for scalable low-cost fabrication of miniaturised devices. However, poor selectivity between different target analytes restrains this technology from broader applicability. This is commonly addressed by chemical functionalisation of the sensor surface via catalytic nanoparticles. Yet, while the latter led to significant advances in gas selectivity, nanocatalyst decoration with precise size and coverage control remains challenging. Here, we present CMOS-integrated gas sensors based on tin oxide (SnO2) films deposited by spray pyrolysis technology, which were functionalised with platinum (Pt) nanocatalysts. We deposited size-selected Pt nanoparticles (narrow size distribution around 3 nm) by magnetron-sputtering inert-gas condensation, a technique which enables straightforward surface coverage control. The resulting impact on SnO2 sensor properties for CO and volatile organic compound (VOC) detection via functionalisation was investigated. We identified an upper threshold for nanoparticle deposition time above which increased surface coverage did not result in further CO or VOC sensitivity enhancement. Most importantly, we demonstrate a method to adjust the selectivity between these target gases by simply adjusting the Pt nanoparticle deposition time. Using a simple computational model for nanocatalyst coverage resulting from random gas-phase deposition, we support our findings and discuss the effects of nanoparticle coalescence as well as inter-particle distances on sensor functionalisation.

Adsorption Kinetics of NO2 Gas on Pt/Cr-TiO2/Pt-Based Sensors

NO2 properties that affect its reaction with pristine and Pt-doped SnS2: a gas sensor study

Pt nanoparticle-functionalized Fe2(MoO4)3 hollow microspheres for parts-per-billion NO2 sensors operated at 80 °C

Elucidating the hydrogen adsorption kinetics on Pt/TiO 2 /Pt based highly efficient sensors

Monolayer PtTe2: A promising candidate for NO2 sensor with ultrahigh sensitivity and selectivity

Pristine and Ag decorated In2O3 (110): A gas-sensitive material to selective detect NO2 based on DFT study

Facile Preparation of Size-Controlled TiO2 Nanoparticles by Hot-Filament Metal Oxide Deposition Method and Their Gas Sensing Properties to NO2

Synthesis and Characterization of TiO2 Nanotubes for High-Performance Gas Sensor Applications

Interface engineering of a highly sensitive porous CuO modified rGO layers for room temperature NO 2 gas sensor

Cross-Interference of VOCs in SnO2-Based NO Sensors

A Novel NO2 Sensor Based on TiO2 Nanotubes Array with In-Situ Au Decoration

Investigations on TiO2–NiO@In2O3 nanocomposite thin films (NCTFs) for gas sensing: synthesis, physical characterization, and detection of NO2 and H2S gas sensors

A novel NO2 sensor based on TiO2 nanotubes array with in-situ Au decoration.

Ultrasensitive and reversible NO2 gas sensor based on SnS2/TiO2 heterostructures for room temperature applications

Chemical and Electronic Modulation via Atomic Layer Deposition of NiO on Porous In2O3 Films to Boost NO2 Detection

Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnO2 thin film gas sensors

Nitrogen‐Doped Indium Oxide Electrochemical Sensor for Stable and Selective NO2 Detection

Highly sensitive amperometric Pt-Nafion gas phase nitric oxide sensor: Performance and application in characterizing nitric oxide-releasing biomaterials

Layered Heterostructure of Graphene and TiO2 as a Highly Sensitive and Stable Photoassisted NO2 Sensor

Strong Metal–Support Interaction Induces Dual Reaction Sites for Ultrasensitive and Stable NO2 Detection in Extreme Environments

Mesoporous and Encapsulated In2O3/Ti3C2Tx Schottky Heterojunctions for Rapid and Ppb-Level NO2 Detection at Room Temperature.