Abstract:Smart gas-sensor devices are of crucial importance for emerging consumer electronics and Internet-of-Things (IoT) applications, in particular for indoor and outdoor air quality monitoring (e.g., CO2 levels) or for detecting pollutants harmful for human health. Chemoresistive nanosensors based on metal-oxide semiconductors are among the most promising technologies due to their high sensitivity and suitability for scalable low-cost fabrication of miniaturised devices. However, poor selectivity between different target analytes restrains this technology from broader applicability. This is commonly addressed by chemical functionalisation of the sensor surface via catalytic nanoparticles. Yet, while the latter led to significant advances in gas selectivity, nanocatalyst decoration with precise size and coverage control remains challenging. Here, we present CMOS-integrated gas sensors based on tin oxide (SnO2) films deposited by spray pyrolysis technology, which were functionalised with platinum (Pt) nanocatalysts. We deposited size-selected Pt nanoparticles (narrow size distribution around 3 nm) by magnetron-sputtering inert-gas condensation, a technique which enables straightforward surface coverage control. The resulting impact on SnO2 sensor properties for CO and volatile organic compound (VOC) detection via functionalisation was investigated. We identified an upper threshold for nanoparticle deposition time above which increased surface coverage did not result in further CO or VOC sensitivity enhancement. Most importantly, we demonstrate a method to adjust the selectivity between these target gases by simply adjusting the Pt nanoparticle deposition time. Using a simple computational model for nanocatalyst coverage resulting from random gas-phase deposition, we support our findings and discuss the effects of nanoparticle coalescence as well as inter-particle distances on sensor functionalisation.

Cross-Interference of VOCs in SnO2-Based NO Sensors

Enhanced gas-sensing performance of SnO2/Nb2O5 hybrid nanowires

High selectivity of sulfur-doped SnO 2 in NO 2 detection at lower operating temperatures.

Investigation of Microstructure Effect on NO2 Sensors Based on SnO2 Nanoparticles/Reduced Graphene Oxide Hybrids.

Effect of V2O5 coating on NO2 sensing properties of WO3 thin films

Resistive-type VOCs and pollution gases sensor based on SnO2: A review

A Combined Experimental and Theoretical Study of Composite Sno2-Bivo4 for Selective No2 Sensing

Enhanced NO2 Sensing of SnO2/SnS2 Heterojunction Based Sensor

Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnO2 thin film gas sensors

Design and Application of Highly Responsive and Selective Rgo-Sno2 Nanocomposites for NO2 Monitoring

Gas sensing selectivity of SnO2-xNiO sensors for homogeneous gases and its selectivity mechanism: Experimental and theoretical studies

The Heterostructures of CuO and SnOx for NO2 Detection

In-situ Construction of SnO2 Nanolayer-Sns2 Nanosheets Heterostructures for Enhanced NO2 Sensing at Room Temperature and Their DFT Investigation

Gas Sensing Selectivity of SnO 2 -xNiO Sensors for Homogeneous Gases and its Selectivity Mechanism: Experimental and Theoretical Studies

Opposite Sensing Response of Heterojunction Gas Sensors Based on SnO2-Cr2O3 Nanocomposites to H2 Against CO and Its Selectivity Mechanism.

Synergistic Effect of Electron Scattering and Space Charge Transfer Enabled Unprecedented Room Temperature NO2 Sensing Response of SnO2

Effects of ZnO Addition on Response of Nio Sensing Electrode for Mixed-Potential-Type Zirconia-Based NOx Sensor

NO2 properties that affect its reaction with pristine and Pt-doped SnS2: a gas sensor study

ZnO single nanowire gas sensor: A platform to investigate the sensitization of Pt

SnO2 as a gas sensor in detection of volatile organic compounds: A review

Synergistic Effect of Electron Scattering and Space Charge Transfer Enabled Unprecedented Room Temperature NO<sub>2</sub> Sensing Response of SnO<sub>2</sub>