Abstract:Controlling thermal energy transfer at the nanoscale has become critically important in many applications and thermal properties since it often limits device performance. In this work, we study the effects on thermal conductivity arising from the nanoscale structure of free-standing nanocrystalline silicon films and the increasing surface-to-volume ratio when fabricated into suspended optomechanical nanobeams. We characterize thermal transport in structures with different grain sizes and elucidate the relative impact of grain size and geometrical dimensions on thermal conductivity. We use a micro-time-domain thermoreflectance method to study the impact of the grain size distribution, from 10 to 400 nm, on the thermal conductivity in free-standing nanocrystalline silicon films considering surface phonon and grain boundary scattering. We find a drastic reduction in the thermal conductivity, down to values of 10 W.m^{-1}.K^{-1} and below, which is just a fraction of the conductivity of single crystalline silicon. Decreasing the grain size further decreases the thermal conductivity. We also observe that this effect is smaller in OM nanostructures than in membranes due to the competition of surface scattering in decreasing thermal conductivity. Finally, we introduce a novel versatile contactless characterization technique that can be adapted to any structure supporting a thermally shifted optical resonance and use it to evaluate the thermal conductivity. This method can be used with optical resonances exhibiting different mode profiles and the data is shown to agrees quantitatively with the thermoreflectance measurements. This work opens the way to a more generalized thermal characterization of optomechanical cavities and to create hot-spots with engineered shapes at desired position in the structures as a means to study thermal transport in coupled photon-phonon structures.

Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

Thermal Conductivity of Mechanically Joined Semiconducting/Metal Nanomembrane Superlattices

Reconstructing phonon mean free path contributions to thermal conductivity using nanoscale membranes

Thermal conductivity reduction in rough silicon nanomembranes

Thermoelectric characterization of crystalline nano-patterned silicon membranes

Reduction in Modulus of Suspended Sub-2 nm Single Crystalline Silicon Nanomembranes

Super-Suppression of Long Phonon Mean-Free-Paths in Nano-engineered Si due to Heat Current Anticorrelations

Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3w-Volklein method

In Situ And Noncontact Measurement Of Silicon Membrane Thermal Conductivity

Ultralow thermal conductivity of single crystalline porous silicon nanowires

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Thermal properties of nanocrystalline silicon nanobeams

A novel high resolution contactless technique for thermal field mapping and thermal conductivity determination: Two-Laser Raman Thermometry

Tuning the Anisotropic Thermal Transport in {110}-Silicon Membranes with Surface Resonances

Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3$ω$-V$\ddot{o}$lklein method

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

A Detailed Study on Phonon Transport in Thin Silicon Membranes with Phononic Crystal Nanostructures

Native Surface Oxide Turns Alloyed Silicon Membranes into Nanophononic Metamaterials with Ultralow Thermal Conductivity

Measurement Of The Thermoelastic Properties Of Crystalline Si Fibres

Anomalously High Thermal Conductivity of Amorphous Silicon Films Prepared by Hot-Wire Chemical Vapor Deposition

Ultra-Thin Free-Standing Single Crystalline Silicon Membranes with Strain Control