High-efficiency cluster laser vaporization sources based on Ti: sapphire lasers

M. Pellarin,E. Cottancin,J. Lermé,J.L. Vialle,J.P. Wolf,M. Broyer,V. Paillard,V. Dupuis,A. Perez,J.P. Perez,J. Tuaillon,P. Melinon
DOI: https://doi.org/10.1016/0009-2614(94)00553-2
IF: 2.719
1994-07-01
Chemical Physics Letters
Abstract:A new laser vaporization source based on a flashlamp-pumped Ti:sapphire laser has been used to produce cluster beams. The performance is compared to the standard cluster sources based on neodyme YAG lasers. We show that the Ti:sapphire source is much more efficient: the clusters deposition rate are about 30 times higher, and larger clusters are produced. Finally the quality of nanostructured films is comparable to those obtained by the standard source, but the time deposition is 30 times shorter. This opens new possibilites for film growth by cluster deposition.
chemistry, physical,physics, atomic, molecular & chemical
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