Low-debris Plasma Source Produced by High-Power Laser

JQ Lin,XW Song,B Chen,JL Cao
DOI: https://doi.org/10.1117/12.317924
1998-01-01
Abstract:Laser-produced plasma is an attractive table-top x-ray source for many applications, such as microscopy and lithography. Soft x-ray conversion efficiency depends strongly on the laser parameters in use and the produced debris with metal target is an intolerable side-effect in some applications. In this paper, we will optimize laser parameters for the yield of soft x-ray, give the experimental results of low debris solid state CO2 target.
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