Formation of optically transparent nanocomposite protective coatings on glass produced by ionic implantation and magnetron sputtering methods for space applications

V P Sergeev,M P Kalashnikov,I A Bozhko,E V Rybalko,O V Sergeev,A V Voronov,M V Fedorischeva
DOI: https://doi.org/10.1088/1742-6596/857/1/012038
2017-05-01
Journal of Physics: Conference Series
Abstract:The purpose of this research is design of a magnetron deposition technology for quartz glasses of optically transparent nanocomposite protective coatings based on Al-Si-N with preliminary modification of the substrate surface by a high-energy Ni+ ion beam. The coating improves the mechanical properties and resistance of the glass to the impact of highspeed iron microparticles. The structural-phase state and elemental composition of the coatings and the surface layer of the substrate are investigated by electron microscopy, electron-probe analysis, and secondary ion mass spectrometry.
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