Abstract:In order to efficiently extract power from piezoelectric vibration energy harvesters, various active rectifiers have been proposed in the past decade, which include synchronized switch harvesting on inductor (SSHI), synchronous electric charge extraction (SECE), and so on. Although reported active rectifiers show good performance improvements compared to full-bridge rectifiers (FBRs), large off-chip inductors are typically required and the system volume is inevitably increased as a result, counter to the requirement for system miniaturization. In this paper, a fully integrated split-electrode synchronized switch harvesting on capacitors (SSHC) rectifier is proposed, which achieves significant performance enhancement without employing any off-chip components. The proposed circuit is designed and fabricated in a 0.18- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> CMOS process and it is co-integrated with a custom microelectromechanical systems (MEMS) piezoelectric transducer with its electrode layer equally split into four regions. The measured results show that the proposed rectifier can provide up to 8.2 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> and 5.2 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> boost, using on-chip and off-chip diodes, respectively, in harvested power compared to an FBR under low excitation levels and the peak rectified output power achieves 186 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{W}$ </tex-math></inline-formula> .

mm-Scale and MEMS piezoelectric energy harvesters powering on-chip CMOS temperature sensing for IoT applications

A Nail-Size Piezoelectric Energy Harvesting System Integrating a MEMS Transducer and a CMOS SSHI Circuit

A High-Efficiency Piezoelectric Energy Harvesting and Management Circuit Based on Full-Bridge Rectification

Piezoelectric MEMS Energy Harvester for Low-Power Applications

A heterogeneous integrated self-powered IoT system of an LiNbO3 device and CMOS readout circuit

A Fully Integrated Split-Electrode SSHC Rectifier for Piezoelectric Energy Harvesting

A Cold-Startup SSHI Rectifier for Piezoelectric Energy Harvesters with Increased Open-Circuit Voltage

A Low-Power CMOS Current Reference for Piezoelectric Energy Harvesters

Low-Power On-Chip Energy Harvesting: from Interface Circuits Perspective

A Passive Design Scheme to Increase the Rectified Power of Piezoelectric Energy Harvesters

A vibration-based MEMS piezoelectric energy harvester and power conditioning circuit

Self-powered piezoelectric energy harvesting with ultra-low power consumption for low-amplitude ambient vibrations

Investigation of Self-Powered IoT Sensor Nodes for Harvesting Hybrid Indoor Ambient Light and Heat Energy

Applications of a Novel Tunable Piezoelectric Vibration Energy Harvester

Design, Fabrication and Characterization of a Piezoelectric Microgenerator Including a Power Management Circuit

A miniaturized statically balanced compliant mechanism for on-chip ultralow wide-bandwidth vibrational energy harvesting

A 840- μm 2 low-power all-MOS temperature sensor front-end with real-time voltage calibration

A Resistive Sensor Interface IC with Inductively Coupled Wireless Energy Harvesting and Data Telemetry for Implantable Pressure Sensing.

High-performance piezoelectric energy harvesting system with anti-interference capability for smart grid monitoring

Magnetically Levitated/piezoelectric/triboelectric Hybrid Generator As a Power Supply for the Temperature Sensor

An ultra-low power CMOS image sensor with on-chip energy harvesting and power management capability