Efficient Computational Prototyping of Mixed Technology Microfluidic Components and Systems

Narayan R. Aluru,Jacob White,George E. Kamiadakis,Kartikeya Mayaram,Chang Liu
DOI: https://doi.org/10.21236/ada407301
2002-08-01
Abstract:Fast and efficient Computer Aided Design (CAD) tools for microfluidic components and systems were developed in this effort. Innovative numerical methods and algorithms for mixed-technology simulation of microfluidic devices and systems are described. Algorithms and techniques for coupled circuit/device modeling of microfluidic systems are presented. Test structures and devices were fabricated, and measurements taken to enable the computational prototyping of microfluidics and Micro-Electro Mechanical Systems (MEMS).
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