Abstract:Perovskite materials, of which strontium titanate (STO) and its thin films are an example, have attracted significant scientific interest because of their desirable properties and the potential to tune thermal conductivity by employing several techniques. Notably, strontium titanate thin films on silicon (Si) substrates serve as a fundamental platform for integrating various oxides onto Si substrates, making it crucial to understand the thermal properties of STO on Si. This work investigates the thermal conductivity of STO thin films on an Si substrate for varying film thicknesses (12, 50, 80, and 200 nm) at room temperature (∼300 K). The thin films are deposited using molecular beam epitaxy on the Si substrate and their thermal conductivity is characterized using the frequency domain thermoreflectance (FDTR) method. The measured values range from 7.4 ± 0.74 for the 200 nm thick film to 0.8 ± 0.1 W m−1 K−1 for the 12 nm thick film, showing a large effect of the film thickness on the thermal conductivity values. The trend of the values is diminishing with the corresponding decrease in the thin film thickness, with a reduction of 38%–93% in the thermal conductivity values, for film thicknesses ranging from 200 to 12 nm. This reduction in the values is relative to the bulk single crystal values of STO, which may range from 11 to 13.5 W m−1 K−1 [Yu et al., Appl. Phys. Lett. 92, 191911 (2008) and Fumega et al., Phys. Rev. Mater. 4, 033606 (2020)], as measured by our FDTR-based experiment. The study also explores the evaluation of volumetric heat capacity (Cp). The measured volumetric heat capacity for the 200 nm thin film is 3.07 MJ m−3 K−1, which is in reasonable agreement with the values available in the literature.

Impact of thermal strain on the dielectric constant of sputtered barium strontium titanate thin films

Dielectric properties of sol-gel derived barium-strontium-titanate (Ba(0.4)Sr(0.6)TiO(3)) thin films

Effects of deposition conditions on the dielectric non-linearity of Ba 0.6Sr0.4TiO3 thin films

Strain-temperature Phase Diagram of BaZrO3 with Antiferrodistortive Distortions

Manipulation of phase transitions and electrical properties of Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thin films through orientation engineering

Influence of the Strain on Dielectric and Ferroelectric Properties of 0.5Bazr0.2ti0.8o3–0.5ba0.7ca0.3tio3

Strain Tunability of Dielectric and Ferroelectric Properties in Epitaxial Lead Titanate Thin Films

Influence of Lattice Mismatch on Structural and Functional Properties of Epitaxial Ba0.7Sr0.3TiO3 Thin Films

Impact of Thermal Stress on the Piezoelectric and Dielectric Properties of Pbtio3 Thick Films on Various Substrates

Structure and dielectric characteristics of epitaxially strained BaTiO 3 thin films

Dielectric Dynamics of the Polycrystalline Ba0.5sr0.5tio3 Thin Films

Strain Effects on Conductivity and Charge Transport in La-doped BaTiO3 Thin Films

Impact of Effective Shear Strain on the Equilibrium Phases and Polarization States of PbTiO3 Thin Film

Evaluating the impact of substrate deposition on optical properties of perovskite barium strontium titanate (Ba0.5Sr0.5TiO3) thin films prepared by pulsed laser deposition technique

Strain Engineering of Perovskite Thin Films Using a Single Substrate.

Low-temperature deposition of (110)-oriented barium titanate thin films and their electrical properties

Thickness dependent thermal conductivity of strontium titanate thin films on silicon substrate

Dielectric characteristics of barium strontium titanate films prepared by aerosol deposition on a Cu substrate

Effect of Strain Gradient on Dielectric Properties of BaTiO_3 Thin Films

Tuning Ferroelectric Properties of Barium Titanate by Lateral Strain: A Molecular Dynamics Simulation Study

Sizable Electrocaloric Effect in a Wide Temperature Range Tuned by Tensile Misfit Strain in BaTiO3 Thin Films