Abstract:Material removal rates as well as surface and subsurface quality are key aspects for the industrial application of ultrashort pulse (USP) laser machining. However, revealing so-called subsurface damage (SSD) is challenging. The presented study visualizes and quantifies subsurface damage patterns in areal USP laser ablation of fused silica (FS) and glass N-BK7 (BK). For the first time, using high-resolution optical coherence tomography (OCT) as non-destructive and three-dimensional (3D) evaluation method, SSD morphologies of areal laser machining induced damages are analysed. Influences of laser wavelength, beam geometry and processed material are investigated. Discovered differences of damage morphologies and depth in FS and BK point out the relevance of selecting suitable process parameters. Based on the evaluation of volumetric OCT data, the authors were able to quantify damage morphologies using the surface texture ratio as well as power spectral density functions. One important finding for the quantification and comparability of damage depths in USP laser processing is the influence of applicable evaluation thresholds. In comparison to area thresholds of 0.001% being applicable to OCT measurements, more lenient thresholds of e.g. 1% commonly applied in destructive SSD measurement methods in average result in a reduction of measured damage depths by a factor of ~ 2. This potentially leads to an underestimation of damage depths depending on methods on thresholds used. The presented measurement and evaluation methods as well as gained process insights are important assets for the future optimization of low-damage USP laser micromachining of brittle materials. Moreover, the general applicability and relevance of OCT-based morphological damage analysis in laser material processing is shown.

Surface laser damage thresholds determined by photoacoustic deflection

Laser-induced thermal damage detection in metallic materials via acoustic emission and ensemble empirical mode decomposition

Effect of Variable Cross-Section Rod on Laser-Induced Surface Acoustic Waves.

Quantitative Detection of Surface Defect Using Laser-Generated Rayleigh Wave with Broadband Local Wavenumber Estimation

Thin-Film Adhesion Measurement Using Laser-Generated High-Power Surface Acoustic Wave

Study on the relationship between the damage of machined surface layer and the dispersion curve of laser-induced surface acoustic wave

Study of AFM-based probe for detecting laser induced surface acoustic wave

Wavelength dependence of femtosecond laser-induced damage threshold of optical materials

Combining laser-induced fluorescence and light-scattering microscopies to diagnose low-fluence damage precursors on KDP-based crystal surface

Pulsed HF/DF Laser Damage in Window Materials.

Non-destructive testing of subsurface damage for early indication of laser-induced damage threshold in fused silica

An accurate, repeatable, and well characterized measurement of laser damage density of optical materials

Method for measuring the laser damage threshold of crystal

Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source

Revealing Subsurface Damage Morphology and Patterns in areal Ultrashort Pulse Laser Machining of Glass

Evaluation of the surface damage of brittle materials based on the attenuation of laser-induced surface acoustic wave

Laser Scanning Microscopy for Tomographic Imaging of Roughness and Point Absorbers in Optical Surfaces

Laser Induced Damage of Optical Elements–a Status Report

Laser-Induced Damage in Optical Materials

Dynamics of Femtosecond Laser Pulse Induced Damage in Multilayers

Laser-induced damage thresholds of bulk and coating optical materials at 1030 nm, 500 fs