Abstract:Electrically detected magnetic resonance (EDMR) is a spectroscopic technique that provides information about the physical properties of materials through the detection of variations in conductivity induced by spin-dependent processes. EDMR has been widely applied to investigate thin-film semiconductor materials in which the presence of defects can induce the current limiting processes. Conventional EDMR measurements are performed on samples with a special geometry that allows the use of a typical electron paramagnetic resonance (EPR) resonator. For such measurements, it is of utmost importance that the geometry of the sample under assessment does not influence the results of the experiment. Here, we present a single-board EPR spectrometer using a chip-integrated, voltage-controlled oscillator (VCO) array as a planar microwave source, whose geometry optimally matches that of a standard EDMR sample, and which greatly facilitates electrical interfacing to the device under assessment. The probehead combined an ultrasensitive transimpedance amplifier (TIA) with a twelve-coil array, VCO-based, single-board EPR spectrometer to permit EDMR-on-a-Chip (EDMRoC) investigations. EDMRoC measurements were performed at room temperature on a thin-film hydrogenated amorphous silicon (a-Si:H) pin solar cell under dark and forward bias conditions, and the recombination current driven by the a-Si:H dangling bonds (db) was detected. These experiments serve as a proof of concept for a new generation of small and versatile spectrometers that allow in situ and operando EDMR experiments.

Electrically detected magnetic resonance signal from iron contaminated Czochralski silicon crystal

Electrically Detected Magnetic Resonance Modeling and Fitting: An Equivalent Circuit Approach

Electrically detected magnetic resonance of carbon dangling bonds at the Si-face 4H-SiC/SiO$_2$ interface

Defects in planar Si pn junctions studied with electrically detected magnetic resonance

Electrically Detected Magnetic Resonance on a Chip (EDMRoC) for Analysis of Thin-Film Silicon Photovoltaics

Spin-dependent recombination involving oxygen-vacancy complexes in silicon

Improvement of charge-pumping electrically detected magnetic resonance and its application to silicon metal–oxide–semiconductor field-effect transistor

Spin-dependent recombination at arsenic donors in ion-implanted silicon

Enhancing the the electrical readout of the spin-dependent recombination current in SiC JFETs for EDMR based magnetometry using a tandem (de-)modulation technique

Low-field microwave absorption and magnetoresistance in iron nanostructures grown by electrodeposition on n-type lightly-doped silicon substrates

Radio frequency readout of electrically detected magnetic resonance in phosphorus-doped silicon MOSFETs

Electrical Property Of Iron-Related Defects In N-Type Dislocated Czochralski Silicon Crystal Used For Solar Cells

Defect-Related Electroluminescence from Metal-Oxide-Semiconductor Devices with Zro2 Films on Silicon

Correlation Between Oxygen Precipitation and Extended Defects in Czochralski Silicon: Investigation by Means of Scanning Infrared Microscopy

Scanning Infrared Microscopy Study of Thermal Processing Induced Defects in Low Resistivity Si Wafers

Investigation of the Magnetic Properties of Silicon Doped with Rare-Earth Elements

Internal Gettering of Copper Contamination in Czochralski Silicon

Transmission Electron Microscopy Investigation of the Micro-Defects in Czochralski Silicon

Electric Detection of Ferromagnetic Resonance in Single Crystal Iron Film

Structural Characterization And Iron Detection At Sigma 3 Grain Boundaries In Multicrystalline Silicon

Common Background Signals in Voltammograms of Crystalline Silicon Electrodes are Reversible Silica-Silicon Redox Chemistry at Highly Conductive Surface Sites.