Fabrication of smooth thin film of vanadium oxides ($$\hbox {VO}_x$$) using pulsed laser deposition

Devanshi Bhardwaj,Deependra Kumar Singh,S. B. Krupanidhi,A. M. Umarji
DOI: https://doi.org/10.1007/s00339-020-3310-5
2020-02-05
Applied Physics A
Abstract:We report the synthesis of vanadium oxide thin films by the pulsed laser deposition under different parameter conditions on <span class="mathjax-tex">\(\hbox {Si/SiO}_2\)</span> substrates using <span class="mathjax-tex">\(\hbox {V}_2\hbox {O}_5\)</span> target. The objective of the present work was to achieve smooth <span class="mathjax-tex">\(\hbox {VO}_2\)</span> thin film in a single step. Synergistic effect of the deposition parameters on the phase of vanadium oxides is studied by a series of experiments designed using Taguchi analysis. Conditions for depositing different oxides of vanadium like <span class="mathjax-tex">\(\hbox {VO}_2\)</span>, <span class="mathjax-tex">\(\hbox {V}_2\hbox {O}_3\)</span>, <span class="mathjax-tex">\(\hbox {V}_3\hbox {O}_5\)</span> and a new phase, <span class="mathjax-tex">\(\hbox {V}_7\hbox {O}_{16}\)</span> was established. The range of parameters varied were: gas pressure: <span class="mathjax-tex">\(10^{-3}\)</span>–5 <span class="mathjax-tex">\(\times\)</span> <span class="mathjax-tex">\(10^{-2}\)</span> mbar; temperature: 500–700 <span class="mathjax-tex">\(^\circ\)</span>C; target-substrate distance: 30–40 mm and laser energy: 100–200 mJ. <span class="mathjax-tex">\(\hbox {VO}_2\)</span> film with surface roughness of 3.68 nm having a semiconductor-to-metal transition (SMT) at 72 <span class="mathjax-tex">\(^\circ\)</span>C with 2–3 orders of resistance change was achieved. Taguchi model was statistically analyzed to determine the suitable condition as well as effect of deposition parameters to obtain phase pure <span class="mathjax-tex">\(\hbox {VO}_2\)</span> thin film. The optimum condition for deposition was found to be: gas pressure: 5 <span class="mathjax-tex">\(\times\)</span> <span class="mathjax-tex">\(10^{-2}\)</span> mbar; temperature: 600 <span class="mathjax-tex">\(^\circ\)</span>C; distance: 35 mm, and laser energy: 200 mJ after analyzing using Taguchi model.
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