Abstract:Many brittle materials, such as single-crystal materials, amorphous materials, and ceramics, are widely used in many industries such as the energy industry, aerospace industry, and biomedical industry. In recent years, there is an increasing demand for high-precision micro-machining of these brittle materials to produce precision functional parts. Traditional ultra-precision micro-machining can lead to workpiece cracking, low machined surface quality, and reduced tool life. To reduce and further solve these problems, a new micro-machining process is needed. As one of the nontraditional machining processes, rotary ultrasonic machining is an effective method to reduce the issues generated by traditional machining processes of brittle materials. Therefore, rotary ultrasonic micro-machining (RUμM) is investigated to conduct the surface micro-machining of brittle materials. Due to the small diameter cutting tool (<500 μm) and high accuracy requirements, the impact of input parameters in the rotary ultrasonic surface micro-machining (RUSμM) process on tool deformation and cutting quality is extremely different from that in rotary ultrasonic surface machining (RUSM) with relatively large diameter cutting tool (∼10 mm). Up till now, there is still no investigation on the effects of ultrasonic vibration (UV) and input variables (such as tool rotation speed and depth of cut) on cutting force and machined surface quality in RUSμM of brittle materials. To fill this knowledge gap, rotary ultrasonic surface micro-machining of the silicon wafer (one of the most versatile brittle materials) was conducted in this study. The effects of ultrasonic vibration, tool rotation speed, and depth of cut on tool trajectory, material removal rate (MRR), cutting force, cutting surface quality, and residual stress were investigated. Results show that the ultrasonic vibration could reduce the cutting force, improve the cutting surface quality, and suppress the residual compressive stress, especially under conditions with high tool rotation speed.

Analytical and experimental investigation on cutting force in longitudinal-torsional coupled rotary ultrasonic machining zirconia ceramics

Kinematics and Simulation Analysis of Longitudinal-Torsional Ultrasonic Assisted Grinding of Zirconia Ceramics

Feasibility Study of Longitudinal–Torsional-Coupled Rotary Ultrasonic Machining of Brittle Material

Experimental and Theoretical Investigation on Critical Cutting Force in Rotary Ultrasonic Drilling of Brittle Materials and Composites

Longitudinal-torsional coupled rotary ultrasonic machining end surface grinding of SiCf/SiC composites: a mechanical model of cutting force

Theoretical and experimental investigations on rotary ultrasonic surface micro-machining of brittle materials

Experimental study on vibration stability in rotary ultrasonic machining of ceramic matrix composites: Cutting force variation at hole entrance

Theoretical and Experimental Investigation on Inclined Ultrasonic Elliptical Vibration Cutting of Alumina Ceramics

Optimization of Machining Parameters for Milling Zirconia Ceramics by Polycrystalline Diamond Tool

Precision Grinding Technology of Silicon Carbide (SiC) Ceramics by Longitudinal Torsional Ultrasonic Vibrations

Reducing cutting force in rotary ultrasonic drilling of ceramic matrix composites with longitudinal-torsional coupled vibration

Grinding force modeling in ultrasonic-assisted face grinding of ZrO2 ceramics and influence of grinding wheel wear on its accuracy

Mathematical Model for Cutting Force in Rotary Ultrasonic Face Milling of Brittle Materials

Cutting force and specific energy for rotary ultrasonic drilling based on kinematics analysis of vibration effectiveness

Investigation of force modeling in ultrasonic vibration-assisted drilling SiC f /SiC ceramic matrix composites

Investigations on the critical feed rate guaranteeing the effectiveness of rotary ultrasonic machining.

Study on cutting performance of ceramic rock slab machined by rotating ultrasonic vibration

Mechanistic cutting force model for rotary ultrasonic machining of rocks

Modeling of cutting forces in 1-D and 2-D ultrasonic vibration-assisted milling of Ti-6Al-4V

Investigation of Cutting Force in Longitudinal-Torsional Ultrasonic-Assisted Milling of Ti-6Al-4V

Investigation on cutting forces and tool wear in high-speed milling of Ti-6Al-4V assisted by longitudinal torsional ultrasonic vibrations