Abstract:A numerical modeling study, based on 3D finite element method (FEM) simulation and 1D analytical solutions, has been carried out to evaluate the capabilities of two ac methods for measuring in-plane thermal conductivity of thin film deposited on the back of a suspended SiNx membrane setup. Two parallel metal strips are present on the top of the dielectric membrane. One strip (S1) serves as both heater and thermometer, while another one (S2) acts as thermometer only. For a modified phase shift (MPS) method, it is crucial to extract the in-plane thermal diffusivity from the phase shift of the temperature oscillation on S2. It was found that the frequency window for carrying out the data fitting became narrower as the in-plane thermal diffusivity of the composite membrane (<math>α∥,C</math>) increased, primarily due to the failure of the semi-infinite width assumption in the low frequency region. To ensure the validity of the method, the upper limit of <math>α∥,C</math> should not exceed ~1.8 × 10−5 m2 s−1 for the specific membrane dimension under consideration (1 × 1 mm2). On the other hand, inspired by a modified Ångström method proposed by Zhu recently, we suggest a new data reduction methodology which takes advantage of the phase shift on both S1 and S2 as well as the amplitude on S1. Based on the simulation results, it is expected that the non-ideality associated with the three "observables" may be at least partially canceled out. Therefore, the frequency window selection for carrying out the data fitting is not sensitive to the magnitude of <math>α∥,C</math> and the upper limit of measurable <math>αC,∥</math> can be further increased with respect to the MPS method. For typical specimen films whose in-plane thermal conductivity ranges from 0.84 W m−1 K−1 to 50 W m−1 K−1, the method proposed here yields a theoretical measurement uncertainty of less than 5%.

Measurement and Uncertainty Assessment of the Thermal Conductivity and Diffusivity of Silica Glass using Step-Wise Transient Method

Apparent-Thermal- Conductivity Characterization of Low-Density, Glass-Fiber Insulation Material

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Quantitative Measurement of Thermal Conductivity by SThM Technique: Measurements, Calibration Protocols and Uncertainty Evaluation

Uncertainty Assessment for Very High Temperature Thermal Diffusivity Measurements on Molybdenum, Tungsten and Isotropic Graphite

Direct measurements of thermal transport in glass and ceramic microspheres embedded in an epoxy matrix

Numerical modeling of in-plane thermal conductivity measurement methods based on a suspended membrane setup

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Analysis and Improvement of the Hot Disk Transient Plane Source Method for Low Thermal Conductivity Materials

Simultaneous Measurement of Thermal Conductivity and Volumetric Heat Capacity of Thermal Interface Materials Using Thermoreflectance

Accurate measurement of thermal conductivity of micro-quantity liquids by dielectric transient current method

Quantitative Measurement of the Thermal Contact Resistance between a Glass Microsphere and a Plate

Measurement of the thermal conductivity of nanofluids using a comparative interferometric method

Accurate Measurements of Thermal Conductivity and Thermal Diffusivity of Molten Carbonates

Simultaneous Measurement of Thermal Conductivity and Heat Capacity Across Diverse Materials Using the Square-Pulsed Source (SPS) Technique

A Noncontact Method for Measuring Thermal Conductivity and Thermal Diffusivity of Anisotropic Materials

Omitting Uncertainty of Thermal Conductivity Measurement in Liquids and Nanofluids by Steady-state Circular Parallel-plates

Quantitative evaluation of the natural convection effect on thermal conductivity measurement with transient plane source method

Determination of thermal conductivity, thermal diffusivity, and specific heat of liquids using a thermoelectric module

An improved steady-state method for measuring the thermal contact resistance and bulk thermal conductivity of thin-walled materials having a sub-millimeter thickness

Simultaneous Measurements of the Thermal Conductivity and Thermal Diffusivity of Molten Salts with a Transient Short-Hot-Wire Method