Selection of synthesis parameters for niobium pentaoxide films by oxidation in phosphoric acid solution.

M. A. Okunev,A. R. Dubrovskii,O. V. Makarova,S. A. Kuznetsov,,,,
DOI: https://doi.org/10.37614/2307-5252.2020.3.4.030
2020-11-25
Transaction Kola Science Centre
Abstract:The possibilities of synthesis of niobium pentoxide films by anodic oxidation were studied. The process parameters leading to the formation of coherent dense films were determined. Itwas shown that films with the thickness of 30 up to 400 nm can be obtained during the first 15 minutes of the process by varying the voltage.
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