Abstract:A 2D ultrathin MXene nanosheet was prepared under controlled conditions and employed as a sensitive film to construct a QCM (quartz crystal microbalance) humidity sensor by a dip coating method. The MXene nanosheets were obtained by dislodging the element A from the MAX phase by a facile liquid phase etching method. The morphology and composition of the MXene nanosheets were characterized by means of a number of advanced instruments. It was found that the sample is an ultrathin graphene-like nanosheet. The sensing test results showed that the sensor has a 12.8 Hz/% RH sensitivity, 6 s and 2 s (@ 90%) response/recovery time, maximum humidity hysteresis of 1.16% RH, good stability, and selectivity. Finally, the enhanced humidity response mechanism of the MXene nanosheets was explored by density-functional theory (DFT) calculation and experimental verification. The DFT simulation together with comparison of fluoride-free sample revealed that F elements on the surface of the MXene nanosheets play a more important role in improving humidity responses than OH groups. The results present a new strategy to enhance humidity sensing performance of sensing materials by F<sup>−</sup> doping or decoration. Thus, the sensor has bright potential for humidity sensing.

Controllable preparation of ultrathin MXene nanosheets and their excellent QCM humidity sensing properties enhanced by fluoride doping