A 0.19e- rms Read Noise 16.7Mpixel Stacked Quanta Image Sensor With 1.1 μm-Pitch Backside Illuminated Pixels

Jiaju Ma,Dexue Zhang,Omar A. Elgendy,Saleh Masoodian
DOI: https://doi.org/10.1109/led.2021.3072842
IF: 4.8157
2021-06-01
IEEE Electron Device Letters
Abstract:This letter reports a 16.7 Mpixel, 3D-stacked backside illuminated Quanta Image Sensor (QIS) with 1.1 $mu text{m}$ -pitch pixels which achieves 0.19 e- rms array read noise and 0.12 e- rms best single-pixel read noise under room temperature operation. The accurate photon-counting capability enables superior imaging performance under ultra-low-light conditions. The sensor supports programmable analog-to-digital convertor (ADC) resolution from 1–14 bits and video frame rates up to 40 fps with $4096times4096$ resolution and 600 mW power consumption.
engineering, electrical & electronic
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