Analysis of tip deflection and force of a bimetallic cantilever microactuator

Wen-Hwa Chu,M Mehregany,R L Mullen
DOI: https://doi.org/10.1088/0960-1317/3/1/002
1993-03-01
Journal of Micromechanics and Microengineering
Abstract:The authors present a model of the electromechanical performance of bimetallic cantilever microactuators by deriving the relationship between the tip deflection and change in temperature using a simple analytical approach. The model is verified by comparison with finite element analysis and published experimental data. The maximum tip force generated by a bimetallic cantilever beam is calculated by finding the reaction force needed at the tip to prevent cantilever beam deflection.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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