Magnetic fluid based variable inductors for inductively coupled plasma applications

H. Oka,F.P. Dawson,T. Sakuta,J.D. Lavers

DOI: https://doi.org/10.1109/20.489917

IF: 1.848

1995-01-01

IEEE Transactions on Magnetics

Abstract:This paper identifies a resonant LCC circuit zero voltage switched power supply topology which can be used in conjunction with a variable inductor in inductively coupled plasma applications. Steady state, fundamental component, simulation results confirm that the use of a variable inductor allows the operating power range for zero voltage switching to be extended without having to change the switching frequency.

engineering, electrical & electronic,physics, applied