ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient

Jie Zhou,Yan Liu,Qinwen Xu,Ying Xie,Yao Cai,Jieyu Liu,Wenjuan Liu,Alexander Tovstopyat,Chengliang Sun

DOI: https://doi.org/10.1109/jmems.2021.3102145

IF: 2.829

2021-10-01

Journal of Microelectromechanical Systems

Abstract:The effective electromechanical coupling coefficient ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.684ex" height="3.509ex" style="vertical-align: -1.171ex;" viewBox="0 -1006.6 2447.4 1510.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-4B" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-32" x="1274" y="581"></use><g transform="translate(849,-269)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-66" x="466" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-66" x="1017" y="0"></use></g> <use xlink:href="#MJMAIN-29" x="2057" y="0"></use></g></svg></span> of resonators is crucial for application in radio communication such as fabricating bandpass filters. In this letter, we present a <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="5.829ex" height="2.676ex" style="vertical-align: -0.338ex;" viewBox="0 -1006.6 2509.7 1152.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-30" x="0" y="0"></use><g transform="translate(500,393)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="361" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-78" x="828" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1400" y="0"></use><g transform="translate(1245,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="361" y="0"></use></g></g></g></svg></span> symmetry ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.384ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 1456.9 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-53" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-30" x="867" y="-213"></use> <use xlink:href="#MJMAIN-29" x="1067" y="0"></use></g></svg></span> mode Lamé mode resonator (LMR) operating at 2.563 GHz with a high <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="14.115ex" height="3.843ex" style="vertical-align: -1.505ex;" viewBox="0 -1006.6 6077.4 1654.5" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-4B" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-32" x="1274" y="581"></use><g transform="translate(849,-269)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-76" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="485" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="989" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="1565" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6E" x="2095" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="2695" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6F" x="3057" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="3542" y="0"></use><g transform="translate(3126,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-44" x="0" y="0"></use> <use transform="scale(0.574)" xlink:href="#MJMATHI-6A" x="1020" y="-238"></use></g><g transform="translate(4019,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-66" x="466" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-66" x="1017" y="0"></use></g></g></g></svg></span> of 7.83%. A 20% Scandium-doped Aluminum Nitride (Sc_0.2Al_0.8N)/AlN composite piezoelectric film is used as the piezoelectric layer. The ratio of piezoelectric layer thickness ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="13.473ex" height="3.176ex" style="vertical-align: -1.171ex;" viewBox="0 -863.1 5800.7 1367.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use><g transform="translate(361,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-76" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="485" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="989" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="1565" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6E" x="2095" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="2695" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6F" x="3057" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="3542" y="0"></use><g transform="translate(3126,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-44" x="0" y="0"></use> <use transform="scale(0.574)" xlink:href="#MJMATHI-6A" x="1020" y="-238"></use></g><g transform="translate(4019,0)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-69" x="503" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="849" y="0"></use></g></g> <use xlink:href="#MJMAIN-29" x="5411" y="0"></use></g></svg></span> and electrode pitch ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.652ex" height="2.843ex" style="vertical-align: -0.838ex;" viewBox="0 -863.1 2002.8 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-50" x="0" y="0"></use><g transform="translate(642,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6C" x="466" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="765" y="0"></use></g> <use xlink:href="#MJMAIN-29" x="1613" y="0"></use></g></svg></span> is optimized by finite element analysis (FEA) method and the highest experimental <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.78ex" height="3.509ex" style="vertical-align: -1.171ex;" viewBox="0 -1006.6 2057.9 1510.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-4B" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-32" x="1274" y="581"></use><g transform="translate(849,-269)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-66" x="466" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-66" x="1017" y="0"></use></g></g></svg></span> is obtained at <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="15.375ex" height="3.009ex" style="vertical-align: -1.005ex;" viewBox="0 -863.1 6619.6 1295.7" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use><g transform="translate(361,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-69" x="503" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="849" y="0"></use></g> <use xlink:href="#MJMAIN-2F" x="1391" y="0"></use><g transform="translate(1892,0)"> <use xlink:href="#MJMATHI-50" x="0" y="0"></use><g transform="translate(642,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6C" x="466" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="765" y="0"></use></g></g> <use xlink:href="#MJMAIN-3D" x="3783" y="0"></use><g transform="translate(4839,0)"> <use xlink:href="#MJMAIN-30"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-36" x="779" y="0"></use> <use xlink:href="#MJMAIN-35" x="1279" y="0"></use></g></g></svg></span> . The proposed LMR with Sc doping and structural optimization shows fascinating prospects for constructing broadband filters. 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