Boron tube diffusion process parameters for high-efficiency n-TOPCon solar cells with selective boron emitters
Qinqin Wang,kaiyuan Guo,Ling Yuan,Lvzhou Li,Hui Peng,Bairu Li,Aili Wang,Luozheng Zhang,Wangping Wu,Jianning Ding,Ningyi Yuan
DOI: https://doi.org/10.1016/j.solmat.2023.112231
IF: 6.9
2023-02-11
Solar Energy Materials and Solar Cells
Abstract:Photovoltaic cell technology plays an important role in achieving carbon neutrality. However, a major challenge to further improving the conversion efficiency is the recombination and electrical contact of boron (B)-doped emitters in n-TOPCon solar cells. Boron-selective emitters (B-SEs) are ideal candidates for reducing the emitter recombination and contact resistivity of n-type silicon solar cells and for providing better blue response. In this study, the key process parameters of BCl 3 tube furnace diffusion (drive-in temperature, oxidation temperature, and BCl 3 gas flow, etc.) were identified, and their impact on the performance of the emitter dark saturation current density under the passivation layer ( J 0 ) and on the contact resistivity (ρ c ) was investigated. The results showed that the BCl 3 gas flow rate ( G BCl3 ) had much less impact than drive-in and oxidation conditions, which is mainly owing to the lower-temperature deposition with lower boron diffusivity. However, the O 2 flow rate under high-temperature oxidation had the greatest impact on passivation and contact resistivity, which is mainly related to the thicker boron rich layer (BRL), resulting in high recombination. We introduced B-SEs formed by 3D printing mask technology and secondary diffusion with p ++ ≈ 75 Ω/sq and p + ≈ 230 Ω/sq, and the efficiency improved by 0.27% absolute to 24.05%, mainly because of the increased open-circuit voltage ( V oc ) of 10 mV. After the optimization of B-SEs and passivation processes, we manufactured industrial-grade TOPCon cells with efficiency ( E ff ), V oc , J sc , and fill factor (FF) values as high as 24.2%, 721 mV, 40.88 mA/cm 2 , and 82.1%, respectively. This simplified B-selective emitter and the implementation of passivated contacts can thus be considered to further increase cell efficiency.
materials science, multidisciplinary,physics, applied,energy & fuels