FEA Based Design Optimization of Exciting Sensitivity for Micromachined Beam Ultrasonic Transducer

Yanan Han,Chenguang Cai,Yang Liu,Antti Salo,Leon Xu,Jilong Xie
DOI: https://doi.org/10.1149/1.3096554
2009-03-06
ECS Transactions
Abstract:This paper presented a design optimization of piezoelectric micromachined ultrasonic transducer for its exciting sensitivity. A micromachined transducer is modeled as a large width-length ratio clamped-clamped beam, with the piezoelectric film to excite the beam vibration. The exciting sensitivity is taken as the optimization objective. Specifically, when the exciting voltage is fixed, the transducer structure is optimized to maximize the vibrating magnitude of the beam. The shape and the size of the piezoelectric layer are selected as the design parameters to optimize the exciting sensitivity of the transducer. In this paper, three different design variations of the piezoelectric layer structures are explored for the optimization. To perform the analysis and the subsequent optimization, the finite element models of the design options are created using ANSYS. The optimal design and the sensitivity analysis are performed; and the corresponding structural parameters of the piezoelectric film layer for optimal design are identified. Finally, we compare the optimization results of the exciting sensitivity for the large width-length ratio clamped-clamped beam based transducers of these three different piezoelectric layer structures; and the design method to improve the exciting sensitivity of the transducer is provided.
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