Abstract:A polarization point diffraction interferometry (PPDI) system, adopting a specially designed even aspheric quarter-wave plate (EAQWP) in the test path, is proposed for low-reflectivity and high-numerical-aperture spherical surface testing. In terms of the low-reflectivity mirror measurement, the obtained poor fringes contrast, which can significantly affect the measurement accuracy, can be improved by the polarization characteristic of the EAQWP. Simultaneously, the wavefront distortion, especially larger in high-numerical apperture (NA) measurement, can be greatly reduced attributable to the even aspheric surface design instead of the plane. In addition, the pose error introduced by EAQWP is demonstrated in detail, and a difference restoration model is built to calibrate it. Consequently, the location of the EAQWP is fixed in the test path after calibrating the pose error, having no need to be adjusted with the change of the spherical mirror under test, which facilitates the system alignment in practical optical shop testing. Ultimately, the surface error of a spherical mirror with a low-reflectivity of 0.04 and a high NA of 0.5 is measured with PPDI. The experimental results are validated to be in good agreement with that of a ZYGO interferometer.

Sensitivity enhanced roll-angle sensor by means of a quarter-waveplate

Measurement Method of the Roll Angle

Measuring Roll Angle Displacement Based on Ellipticity with High Resolution and Large Range

Sensitivity Enhanced Roll Angle Measurement

Roll Angle Interferometer by Means of Wave Plates

Comprehensive Design and Calibration of an Even Aspheric Quarter-Wave Plate for Polarization Point Diffraction Interferometry.

Polarization interference interrogation of angular surface plasmon resonance sensors with wide metal film thickness tolerance

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Grating-Corner-Cube-Based Roll Angle Sensor

Compact optical roll-angle sensor with large measurement range and high sensitivity.

An Integrated Optical Sensor Based on Cascaded Polarization Convertor and Slot Waveguide Microring Resonator

A polarimeter based on electric-optical material

High precision roll angle interferometer

Intensity-Modulated Surface Plasmon Resonance Array Sensor Based on Polarization Control

Angle Measurement Based on Orthogonally Polarized Lasers

Azimuthal Illumination Enabled Ultra-High Polar Angle Sensitivity by a Bloch Surface Wave Resonance Refractive Index Sensor

A compact 2D micro-angle sensor

FFT Algorithm-Assisted Polarimetric Twist Sensor

A Novel Method of Rolling Angle Measurement

Pixelated-polarization-camera-based Polarimetry System for Wide Real-Time Optical Rotation Measurement