Abstract:Atomic force microscopy (AFM) tip-based nanofabrication is as a powerful method to machine nanostructures. However, the traditional AFM scratching process suffers from low processing efficiency and a low rate of material removal. Thus, an AFM tip-based nanomilling method was previously proposed to improve the machining efficiency and material removal rate; however, the machining mechanism of the nanomilling process, especially on hard-brittle silicon crystals, is not well understood. In this study, we used an AFM tip-based nanomilling approach to machine nanochannels on single-crystal silicon to investigate the machining mechanism (i.e., the material removal state, undeformed chip thickness, the brittle-to-ductile transition, and subsurface damage). For the first time, we established a theoretical model for tip-based nanomilling with a constant normal load to predict the machined depth. Nanochannels fabricated with a wide range of feed directions, crystal orientations, and tip trajectories were obtained, which provided a reference for machining high-quality nanochannels and an in-depth understanding of the nanomilling of single-crystal silicon. The experimental results demonstrated that we could machine a nanochannel without pile-ups by selecting a specific trajectory with a feed smaller than 4 nm in the 0 degrees direction, a normal load no greater than 120 mu N, and a crystal orientation at rotation angles of 135 degrees, 157.5 degrees, or 180 degrees. Moreover, transmission electron microscope analysis of the subsurface of the nanochannel revealed a large number of dislocations, stacking faults, and a layer of amorphous silicon. Our findings are of great significance for obtaining high-quality nanochannels with a predicable machined depth and understanding the nanomilling mechanism of hard-brittle materials.

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