Abstract:Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for standard optical materials such as silicon dioxide and silicon nitride. Most importantly, bidirectional thermal tuning on a single platform has not been realized. For the first time, we show that by tuning and optimizing the deposition conditions in inductively-coupled plasma chemical vapor deposition (ICPCVD) of silicon dioxide, this material can be used to deterministically tune the thermo-optic properties of optical devices without introducing significant losses. We demonstrate that we can deterministically integrate positive and negative wavelength shifts on a single chip, validated on amorphous silicon carbide (a-SiC), silicon nitride (SiN) and silicon-on-insulator (SOI) platforms. We observe up to a 10-fold improvement of the thermo-optic tunability and, in addition, demonstrate athermal ring resonators with shifts as low as 1.5 pm/°C. This enables the fabrication of a novel tunable coupled ring optical waveguide (CROW) requiring only a single heater. In addition, the low-temperature deposition of our silicon dioxide cladding can be combined with lift-off to isolate the optical devices resulting in a decrease in thermal crosstalk by at least two orders of magnitude. Our method paves the way for novel photonic architectures incorporating bidirectional thermo-optic tunability.

Thermo-optical bistability in silicon micro-cantilevers

Analytical study of optical bistability in silicon-waveguide resonators

Optical Bistability in Nanosilicon with Record Low Q -Factor

A study of thermally-induced optical bistability and the role of surface treatments in Si-based mid-infrared photonic crystal cavities

Optical bistability on a silicon chip

Photothermal Switching Based on Silicon Mach–Zehnder Interferometer Integrated with Light Absorber

Study Of Laser Excited Vibration Of Silicon Cantilever

Optical Bistability in Semiconductor Periodic Structures

Thermo-optical bistability enabled by bound states in the continuum in silicon metasurfaces

Cavity-enabled self-electro-optic bistability in silicon photonics

Novel Semiconductor Lasers and Integrated Photonic Devices

Optical Bistability in a Silicon Nitride Microring Integrated with 2D PtSe2 [Invited]

Thermally Switchable/tunable Photonic Integrated Devices on Silicon

Optical Bistability By Using A Tunable Fibre Laser With Fibre Fabry-Perot

Optical bistability in a one-dimensional photonic crystal resonator using a reverse-biased pn-junction

High thermo-optic tunability in PECVD silicon-rich amorphous silicon carbide

Resonance frequency shift of strongly heated micro-cantilevers

Wavelength Tracking with Thermally Controlled Silicon Resonators

Room Temperature Optical Bistability in Hydrogenated Amorphous Silicon-Carbon Alloys

Bending of Semiconducting Cantilevers under Photothermal Excitation

Magic silicon dioxide for widely tunable integrated photonics