Research status of energy dispersive X-ray fluorescence spectrometer

Zhao Fengku
Abstract:Background: Energy dispersive X-ray fluorescence spectrometer has been improved rapidly in these years. Purpose: Research status of energy dispersive X-ray fluorescence spectrometers is reviewed, covering the main components in the spectrometer and spectra processing algorithms. Methods: On the component aspect, the working principles and performances of high-voltage generator, X-ray excitation sources, especially X-ray tubes and detector are compared. On the spectra processing aspect, results of different algorithms in spectrum de-noising,background subtraction, decomposition of the peaks and calculating the intensity of the fluorescence are analyzed separately. Results: On the component aspect, the effects to sensitivity and resolution of the spectrometer being caused by the high-voltage of the voltage generator, intensity of X-ray and resolution of the detector are concluded.On the spectra processing aspect, feasibilities of various algorithms are suggested. The advantages of wavelet transform, artificial neural network and partial least-squares method are discussed. Conclusion: Present difficulties in further improving of the spectrometer performance are analyzed. The prospect and the necessity of further research of EDXRF have been suggested.
Physics
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