Imaging circuits in three dimensions

Matthew Parker
DOI: https://doi.org/10.1038/s41928-024-01131-1
IF: 33.255
2024-02-21
Nature Electronics
Abstract:The researchers — who are based at the University of Stuttgart and various companies in Germany — attached a diamond plate containing the NV centres to the area of the circuit to be studied, and then placed the entire setup in a wide-field fluorescence microscope, with a field of view of around 90 μm × 90 μm. The magnetic fields generated by currents affect the spins of the NV centres, which are measured using optically detected magnetic resonance. The method can detect currents as weak as 10 μA μm −2 with sub-micrometre spatial resolution and was tested on two chips used in millimetre-wave radar applications, where one was functional and the other defective. Although the two chips look identical using light microscopy, the NV-based current imaging could identify the failure in the defective chip and locate which layer it was in. Original reference: Phys. Rev. Appl. 21 , 014055 (2024)
engineering, electrical & electronic
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