Perovskite-type SrTiO3 thin film preparation and field emission properties

Ying Yang,Li-Jun Wang,Xiao-Ping Wang,Jia-Xing Chen,Xin-Wei Yang,Meng-Han Li,Man-Jun Deng
DOI: https://doi.org/10.1016/j.vacuum.2020.109466
IF: 4
2020-08-01
Vacuum
Abstract:By using vacuum electron beam vapor deposition (EBVD) technology, perovskite-type SrTiO3 was deposited on indium tin oxide (ITO) conductive glass. The SrTiO3 orientation and its film thickness were well-controlled by appropriately modifying the growth conditions and deposition time. The elemental composition, microstructure, surface morphology and field emission character of SrTiO3 film were characterized by energy dispersive spectrum (EDS), X-ray diffraction (XRD) spectrum, field emission scanning electron microscope (FE-SEM) and field emission (FE) detecting system. The FE test results showed that the SrTiO3 film showed good field emission characteristics. The maximum field emission current density reach 88.96 μA/cm2 at 10.45V/μm applied electric field. And the experimental results show that the SrTiO3 film has certain potential in FE field.
materials science, multidisciplinary,physics, applied
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