Abstract:With the continuous advancements in microelectromechanical systems (MEMS) fabrication technology, inertial sensors like accelerometers and gyroscopes can be designed and manufactured with smaller footprint and lower power consumption. In the literature, there are several reported accelerometer designs based on MEMS technology and utilizing various transductions like capacitive, piezoelectric, optical, thermal, among several others. In particular, capacitive accelerometers are the most popular and highly researched due to several advantages like high sensitivity, low noise, low temperature sensitivity, linearity, and small footprint. Accelerometers can be designed to sense acceleration in all the three directions (X, Y, and Z-axis). Single-axis accelerometers are the most common and are often integrated orthogonally and combined as multiple-degree-of-freedom (MDoF) packages for sensing acceleration in the three directions. This type of MDoF increases the overall device footprint and cost. It also causes calibration errors and may require expensive compensations. Another type of MDoF accelerometers is based on monolithic integration and is proving to be effective in solving the footprint and calibration problems. There are mainly two classes of such monolithic MDoF accelerometers, depending on the number of proof masses used. The first class uses multiple proof masses with the main advantage being zero calibration issues. The second class uses a single proof mass, which results in compact device with a reduced noise floor. The latter class, however, suffers from high cross-axis sensitivity. It also requires very innovative layout designs, owing to the complicated mechanical structures and electrical contact placement. The performance complications due to nonlinearity, post fabrication process, and readout electronics affects both classes of accelerometers. In order to effectively compare them, we have used metrics such as sensitivity per unit area and noise-area product. This paper is devoted to an in-depth review of monolithic multi-axis capacitive MEMS accelerometers, including a detailed analysis of recent advancements aimed at solving their problems such as size, noise floor, cross-axis sensitivity, and process aware modeling.

Development of Dual Axis MEMS Accelerometer Based On SOI-MUMPs Using CoventorWare

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design And Fabrication Of A Slanted-Beam Mems Accelerometer

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-layers SOI Wafer.

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam

An Aluminum Nitride-Based Dual-Axis MEMS In-Plane Differential Resonant Accelerometer

The Design and Simulation of a Coarse-to-Fine Optical MEMS Accelerometer

Versatile and Effective Design Platform for Surface Acoustic Wave Accelerometers

Design and Simulation of A Multi-Finger Micromechanical Silicon Accelerometer

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer

Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers

Design and Simulation of a Novel Single-Chip Integrated MEMS Accelerometer Gyroscope

A new structure and modeling of a three-axis MEMS capacitive accelerometer with high dynamic range and sensitivity

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

Design And Implementation Of A Novel Cmos-Mems Single Proof-Mass Tri-Axis Accelerometer