Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

Compact super-gaussian evanescent beam expanders for integrated photonics

Modeling of Evanescent Coupling Between Two Parallel Optical Nanowires

Design of a Beam-coupling System for a Chip-integrated Spectrometer with a Discrete Linear Waveguide

Veselago-Pendry Superlens Imaging Modeled with a Spectral Waveguide Approach

Design of Off-angle Beaming Device Based on Subwavelength Metal Thin Film Microstructure

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Generating a Nanoscale Blade-Like Optical Field in a Coupled Nanofiber Pair

Ultracompact multiway beam splitters using multiple coupled photonic crystal waveguides

Generating a Sub-Nanometer-confined Optical Field in a Nanoslit Waveguiding Mode

Broadband and High-Performance Devices for the Silicon and Silicon-Nitride Platforms

High-efficiency Gaussian-beam waveguide grating couplers

On-chip beam rotators, adiabatic mode converters, and waveplates through low-loss waveguides with variable cross-sections

Broadband Frequency Conversion and “area Law” in Tapered Waveguides

Curved GaAs cantilever waveguides for the vertical coupling to photonic integrated circuits

Ultrashort And Efficient Adiabatic Waveguide Taper Based On Thin Flat Focusing Lenses

Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics

Optical Coupling in Atomic Waveguide for Vertically Integrated Photonics

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

Generating a Bessel-Gaussian beam for the application in optical engineering

Scalable and Robust Beam Shaping Using Apodized Fish-bone Grating Couplers

Broadband Generation of Photonic Spin-Controlled Arbitrary Accelerating Light Beams in the Visible.