FabSage: A Large Multimodal Model for IC Defect Detection, Analysis, and Knowledge Querying

Cheng Zhuo,Qi Sun,Yuqi Jiang,Xudong Lu,Qian Jin
DOI: https://doi.org/10.1109/LAD62341.2024.10691707
2024-06-28
Abstract:Recently, large multimodal models (LMMs) have demonstrated remarkable efficiency in handling complex multimodal tasks. However, their effectiveness in integrated circuit (IC) defect detection tasks remains constrained by a shortage of IC domain knowledge. In this paper, we introduce FabSage, a novel LMM based on prompt learning, designed for precisely classifying, segmenting, and analyzing IC defects and providing high-quality responses to knowledge queries. By constructing defect text descriptions for defect images in the scanning electron microscope (SEM) image dataset and mapping image-text pairs to a multi-scale spatial domain for similarity learning, FabSage dynamically adjusts segmentation thresholds to identify pixel-level defect regions automatically. Furthermore, we fine-tune the language model with a specialized learnable prompt expert to embed the IC knowledge. FabSage achieves a defect segmentation accuracy of 97.57%, a classification accuracy of 93.46%, and a Q&A accuracy of 93.81% on the SEM image dataset, demonstrating remarkable generalization and adaptability.
Engineering,Computer Science
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