Copper Mg Kα XPS Spectra from the Physical Electronics Model 5400 Spectrometer

A. N. Mansour
DOI: https://doi.org/10.1116/1.1247748
1994-07-01
Surface Science Spectra
Abstract:Copper spectra were measured with the Physical Electronics Model 5400 x-ray photoelectron spectrometer (XPS) using unmonochromatized Mg Kα x rays and four pass energy settings corresponding to analyzer energy resolutions of 1.34, 0.54, 0.27, and 0.13 eV. The specimen was a high purity copper foil that was sputter-cleaned by 3 keV Ar ions. We present the survey spectrum (binding energy range of 0–1100 eV) measured at an analyzer energy resolution of 1.34 eV. Multiplexes of the Cu 2p (924–974 eV), Cu 3p (65–90 eV), Cu 3s (113–138 eV), valence band region (−5–10 eV), and Cu LVV Auger lines (305–355 eV) were measured at analyzer energy resolutions of 0.54, 0.27, and 0.13 eV.
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