Detection of bottom ferromagnetic electrode oxidation in magnetic tunnel junctions by magnetometry measurements

Wei Chen,Dao N. H. Nam,Jiwei Lu,Stuart A. Wolf
DOI: https://doi.org/10.1063/1.3518506
IF: 2.877
2010-12-01
Journal of Applied Physics
Abstract:Surface oxidation of the bottom ferromagnetic (FM) electrode, one of the major detrimental factors to the performance of a magnetic tunnel junction (MTJ), is difficult to avoid during the fabrication process of the MTJ’s tunnel barrier. Since Co rich alloys are commonly used for the FM electrodes in MTJs, overoxidation of the tunnel barrier results in the formation of a CoO antiferromagnetic (AF) interface layer which couples with the bottom FM electrode to form a typical AF/FM exchange bias (EB) system. In this work, surface oxidation of the CoFe and CoFeB bottom electrodes was detected via magnetometry measurements of EB characterizations including the EB field, training effect, uncompensated spin density, and enhanced coercivity. Variations in these parameters were found to be related to the surface oxidation of the bottom electrode, among them the change in coercivity is most sensitive. Annealed samples show evidence for an oxygen migration back to the MgO tunnel barrier by annealing.
physics, applied
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