Influence of MTJ architecture on tunneling magnetoresistive effect for Al natural oxidation samples

Bingjun Qü,Huarui Liu,Tianling Ren,KeQing Ouyang,Zengxu Fan,Lilian Liu
DOI: https://doi.org/10.1109/ICSICT.2004.1435115
2004-01-01
Abstract:Top-pinned and bottom-pinned magnetic tunnel junctions (MTJs) are manufactured using a 6-gun magnetron sputter and annealing process in an applied field of 3000 Oe by pure N protecting. The top-pinned MTJ has the architecture of glass/Ta35Å/NiFe200Å/CoFe10Å/Al(10∼20Å)+oxidation/CoFe 30Å/MnIr150Å/Ta40Å. While the bottom-pinned junction structure is glass/Ta35Å/NiFe20Å/MnIr70Å/CoFe30Å/Al(10∼20Å)+oxidation/CoFeSOÅ/ NiFe45Å/Ta120Å. For the top-pinned architecture, MTJ has a very small magnetoresistive (MR) ratio (2.35%) and the exchange field is approximately 0 Oe. The bottom-pinned MTJ however, has a large MR ratio (26%) and its exchange field is higher than 400 Oe, which makes it promising for applications in magnetic random access memory (MRAM) and some magnetic sensors.
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